• Materials Growth and Characterizations

    broken image
    Furnace CVD for growing 2D layer semiconductors

    We have at least 4 systems for growing different materials

    broken image
    PLD for high-k dielectrics

    We intend to develop high-quality and large-area ultra-high dielectric constant insulators

    broken image
    Confocal Raman spectroscopy

    A high resolution Raman and PL mapping system, equipped with temperature control system

    broken image
    High-Vacuum thermal deposition for metals

    Deposition of high-quality metals for high-performance devices

    broken image
    MOCVD for 2D semiconductors

    Growth of wafer-scale 2D semiconductors

    broken image
    AFM

    Topographic measurement for nanostructures

    broken image
    2D materials Transfer System 

    Transfer of 2D materials onto desired substrates

    broken image
    LED lithography  

    Patterning devices with simple LED projection

  • Device Fabrication and Measurements

    broken image
    Cryogenic probe station

    The system provides He close-cycle cooling environments for electrical measurements.

    broken image
    In-lab clean room

    Small clean room in our lab for lithography, with a 2D materials transfer stage

  • Discussion Chamber in our lab